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Substrate & Size Soda lime &Qz 4inch ~ 8inch G1 ~ G6
Minimum Feature(um) 0.8
Address Grid (nm) 25
LER(3?, nm) 80
CD U(3?, nm) 95
Stripe Butting (3?, nm) 80
Registration (3?, nm) 300
CD linearity(3?, nm) 70
X and Y bias (nm) 50